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DPCP Quantum | TriSENS Vacuum Sensor, Pirani & Capacitive Piezo 7.5×10-6 to 1000 Torr
DPCP Quantum | TriSENS Vacuum Sensor, Pirani & Capacitive Piezo 7.5×10-6 to 1000 Torr
** THIS ITEM IS DROP SHIPPED FROM OUR SUPPLIER, PLEASE CALL FOR LEAD TIME**
The Digivac TriSENS vacuum sensor delivers deep and wide vacuum measurement + process control + overpressure indication all in one gauge where multiple gauges were required before. Range: 7.5×10-6 to 1000 Torr
DPCP Quantum | TriSENS Vacuum Sensor
The Digivac TriSENS Vacuum Sensor Delivers High Vacuum Measurement + Process Control + Overpressure Indication All in One
Deep & Wide Vacuum Measurement
Highly accurate direct pressure measurement down to 10 microns (.01 Torr) combined with high vacuum measurement down to 10-6
Measurement range: 7.5×10-6 to 1000 Torr
Accuracy Specifications:
1000 Torr to .001 Torr = +/- 3%
.0001 Torr to 10-6 Torr = +/- 20%
Contamination Containment
Integrated baffle helps protect sensor elements from particulate contamination and increase its longevity
Visual Process Indicator
Multi-color LEDs to indicate pressure range. Includes a bright yellow overpressure indicator to help you avoid system damage. This is very useful when not using a display controller
The DPCP Quantum | TriSENS Vacuum Sensor establishes new standards with an all-in-one wide range measurement solution for a wide selection of vacuum applications. This transducer is an overall cost-effective solution with an ultra-wide 9 decade range that includes 5 decades of gas independent measurement. The Digivac TriSENS: Quantum Pirani, Capacitance, Piezo all-in-one gauge
Advantages
- Deep & wide measuring range of 9 decades delivered by an all-in-one gauge that combines pirani,
capacitance manometer, and piezo technology - 6 decades of gas independent measurement| 5×10-3 to 1333 mbar
- Reliable solid-state relay for process control
- 0-10V for PLC Input
- LED Color Pressure Indicator
- Robust ceramic capacitance diaphragm gauge
- Mountable in any orientation without impact on performance
Applications
- PVD Coating Equipment
- Freeze Drying endpoint detection
- Load lock control
- Mass Spectrometry
- Scanning electron microscopy
- Semiconductor
- Research
- Vacuum pump service
- Heat treatment, Vacuum furnaces
Why is the Quantum Gauge Series a Quantum Leap for Vacuum Measurement?
The Quantum Gauge Series is a quantum leap in simplicity and range for vacuum gauging. Smart pairings of sensor technologies that deliver what people really need.
All-in-one,highly accurate wide range vacuum measurement at a cost-effective price point.
Other DigiVac Quantum Gauge Series Options: DPP SmartSENS, DCP DuoSENS
Downloads
| Data | ||
| Measuring Range | 1×10-5 to 1333 mbar (7.5×10-6 to 1000 Torr) | |
| Measuring principle 1×10-6 to 1×10-3 mbar | MEMS Pirani thermal conductivity | |
| Measuring principle 5×10-3 to 3.99 mbar | Capacitance manometer | |
| Measuring principle 6 to 1333 mbar | MEMS piezo diaphragm | |
| Measurement Accuracy (Torr) | ||
| From | To | Accuracy |
| 7.5×10-6 | 7.5×10-5 | 50% |
| 7.5×10-5 | 7.5×10-3 | 20% |
| 7.5×10-3 | 1000 Torr | 3% |
